WebThe extracted work functions of fully NiSi and NiGe gates from thickness-dependent flat band voltage were 4.55 and 5.2 eV respectively, which may provide possible wide work function tuning using NiSi/sub t-x/Ge/sub x/. WebJun 4, 1998 · Self-aligned silicidation is a well-known process to reduce source, drain, and gate resistances of submicron metal-oxide-semiconductor devices. This process is particularly useful for devices built on very thin Si layers (∼1000 Å or less) on insulators because of the large source and drain resistances associated with the thin Si layer.NiSi is …
Investigation of NiSi and TiSi as CMOS gate materials
WebArsenic implantation into the polysilicon before silicidation can shift the NiSi work function towards the silicon conduction band, which makes it suitable for high performance NMOS applications. The physical mechanism responsible for this work function shift is arsenic … WebJan 24, 2005 · The midgap work function (4.7 eV) was obtained for undoped mononickel-silicide (NiSi). It was shown that the implantation of both arsenic and antimony into the polysilicon before silicidation reduces the NiSi work function, and the change in work function is greater for antimony than for arsenic. motebello town center in la
Tunable work function in fully nickel-silicided polysilicon …
WebJun 15, 2008 · Abstract In order to elucidate influences of nitrogen on the change of effective work function ( {delta} {phi} {sub eff}) with impurity segregation, we systematically investigated the {delta} {phi} {sub eff} at arsenic (As) and boron (B) segregated NiSi/SiO {sub 2} and NiSi/SiON interfaces. WebLooking for the definition of NISI? Find out what is the full meaning of NISI on Abbreviations.com! 'Northern Infrastructure Standardization Initiative' is one option -- get … WebMar 21, 2005 · Although a linear relationship between work function and Ni percentage was observed for FUSI of undoped poly-Si systems, the work functions of doped Co/sub x/Ni/sub 1-x/Si/sub 2/ are almost identical to those of doped NiSi FUSI metal gates. mining and hydraulic supplies perth